GuardianPro Clean Storage
GuardianPro Reticle Stocker
The GuardianPro™ family of semi bare reticle stockers, with Tec-Cell® Technology pod stockers, provides ultra-clean highly reliable storage and inspection solutions to meet the current and future needs of fabs around the world. GuardianPro reticle stockers deliver technical advantage by ensuring reticle safety, reducing haze, and providing automation solutions to improve reticle logistics and optimize stepper utilization.
Providing ultra-clean highly reliable storage and inspection solutions to meet the current and future needs of fabs around the world.
Innovative Tec-Cell reticle storage technology creates a clean, purged, ESD-safe storage environment. Low-volume gas consumption reduces purge gas usage costs, while ensuring a low-humidity environment to slow or prevent haze or crystal growth. Various filter types support many different applications and technologies.
GuardianPro reticle stockers are available in a range of heights, lengths, and storage capacities with flexible I/O and rotation options and to meet varying fab requirements. Pod storage and OHT load ports are available on select models. Whether fabs face demanding cost and size challenges or need flexibility to handle changing technical requirements at small technology nodes, the GuardianPro family has models to meet their needs.
The GuardianPro family is an innovative combination of reticle stocker and carrier buffer for managing the reticles throughout the fab.
- Increased reticle protection and safety
- Fast cycle times and high reliability
- Superior cleanliness with Tec-Cell Technology
- Minimal footprint with high capacity
- High serviceability and low cost of ownership
- Improved fab logistics
- Clean storage for semiconductor contamination control
GuardianPro Pod Stockers