GuardianPro-1990 Pod Stockers

The Brooks GuardianPro^™ 1900 Pod stocker provides fully automated pod handling with an integrated continuous purge system for each individual pod.

Key Features:

• Fully automated RSP150 handling
• Class 1 mini-environment/ESD/AMC
• N2/xCDA purge for each pod
• Purge flow verification
• Manual back up possible
• OHT interface

GuardianPro 1900 Fully-Automatic EUV Pod Stocker

The Brooks GuardianPro^™ 1900 EUV pod stocker provides a fully automated EUV pod handling and a continuous purge system for each individual pod.

Key Features:

• Fully automated EUV pod handling
• ISO Class 2 mini-environment
• ESD and AMC controlled environment
• N2/xCDA purge for each pod
• Purge flow verification
• High vacuum decontamination chambers for AMC compound removal
• In-situ measurement capability
• Manual back up possible
• OHT interface