PuroMaxx Cleaning Solutions

FOUP/Pod Cleaners

• PuroMaxx^™ 800 300mm FOUP Cleaner
• PuroMaxx^™ 600 Automatic Pod Cleaner
• PuroMaxx^™ 300 Semi-Automatic FOUP/Pod Cleaner

PuroMaxx 800 300mm FOUP Cleaner

The PuroMaxx 800 fully automatic 300mm FOUP cleaner combines the best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot.

Key Benefits:

• High pressure DI-Water spraying with proprietary nozzles combined with IR heating and hot CDA ensures optimal purification of carriers, i.e. removal of particulate matter and AMCs.
• Vacuum chambers in combination with Nitrogen purgeable load ports ensure that VOCs and moisture are being removed entirely before the carriers are being returned.
• State of the Art carrier handling technology and optimized recipes allow for throughputs of up to 25 FPH.
• The tool is the choice for all high end users and is qualified for 3 nm technology.

PuroMaxx 600 Automatic RSP Cleaner

The PuroMaxx 600 fully automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.

Key Benefits:

• Fully automated cleaning tool for RSP150 or RSP200 carriers with OHT interface.
• A fully automated front end handling unit paired with two cleaners working in parallel and buffer stations make this tool the highest throughput cleaner in the industry.
• Class 1 mini-environment & ESD.
• SEMI standard-compliant SECS/GEM interface.

PuroMaxx 1000 EUV Pod Cleaner

The PuroMaxx 1000 fully automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.

Key Benefits:

• Tool of choice for all EUV FABs in the world due to its unique design that provides optimal purification of the carriers at the highest throughput in the industry.
• Separate unclean front end paired with an ultraclean backend guarantees optimal purification of the carriers.
• High pressure DI-Water spraying with proprietary nozzles combined with IR heating and hot CDA ensures optimal purification of carriers, i.e. removal of particulate matter and AMCs.
• Vacuum chambers in combination with Nitrogen purgeable load ports ensure that VOCs and moisture are being removed entirely before the carriers are being returned.